Helicon Wave Measurements in an Inductively Coupled Magnetoplasma
نویسندگان
چکیده
منابع مشابه
Wave propagation and power deposition in magnetically enhanced inductively coupled and helicon plasma sources
Magnetically enhanced inductively coupled plasma ~MEICP! and helicon sources for materials processing are of interest because of their ability to deposit power within the volume of the plasma beyond the classical skin depth. The location and manner of power deposition can vary substantially depending on the mode of operation and reactor conditions. The coupling of electromagnetic fields to the ...
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Wafer-type PZT transducers are very effective as active sensors for Lamb wave studies in elastic plates and in steel bridge girders. It has been demonstrated that a single transducer can be used in pulse-echo mode, transmitting a transient waveform and then detecting return signals echoing from boundaries, irregularities, and flaws such as cracks. We describe here an inductively-coupled system ...
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The ability to deposit power in the volume of plasma reactors at locations deeper than the conventional skin depth makes magnetically enhanced inductively coupled plasma ~MEICP! and helicon sources appealing for use in materials processing. Mechanisms for power deposition and electron energy transport in MEICPs have been computationally investigated using a two-dimensional ~2D! plasma equipment...
متن کاملHelicon Wave Coupling
It is well known that the simple theory of helicon waves, in which the electron mass m e is neglected, is valid only if E z also vanishes, a condition which is not satisfied in experiment. Exact solutions of cold plasma theory with finite m e and E z predict the existence of additional highly damped Trivelpiece-Gould (TG) modes, which can greatly modify the nature of helicon discharges. However...
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We report on experimental and modeling results for photoresist etching with oxygen gas in an inductively coupled large area plasma source ~LAPS!. The source is driven by a 13.56 MHz traveling wave launched along a serpentine antenna embedded in the plasma and has a processing area as large as 40 cm350 cm. We describe a new series-parallel antenna coil configuration, and we present experimental ...
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ژورنال
عنوان ژورنال: Australian Journal of Physics
سال: 1995
ISSN: 0004-9506
DOI: 10.1071/ph950461